Nitrogen bonding, stability, and transport in AlON films on Si

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Title: Nitrogen bonding, stability, and transport in AlON films on Si
Date: 2004
Citation: Soares, G. V., Bastos, K. P., Pezzi, R. P., Miotti, L., Driemeier, C., Baumvol, I. J. R., Hinkle, C., Lucovsky, G. (2004). Nitrogen bonding, stability, and transport in AlON films on Si. Applied physics letters, 84(24), 4992-4994.
URI: http://www.lib.ncsu.edu/resolver/1840.2/266


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