Nitrogen bonding, stability, and transport in AlON films on Si

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2004

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Soares, G. V., Bastos, K. P., Pezzi, R. P., Miotti, L., Driemeier, C., Baumvol, I. J. R., Hinkle, C., Lucovsky, G. (2004). Nitrogen bonding, stability, and transport in AlON films on Si. Applied physics letters, 84(24), 4992-4994.

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