Cathodoluminescence spectroscopy of nitrided SiO2-Si interfaces

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Title: Cathodoluminescence spectroscopy of nitrided SiO2-Si interfaces
Date: 1999
Citation: Young, A. P., Bandhu, R., Schafer, J., Niimi, H., & Lucovsky, G. (1999). Cathodoluminescence spectroscopy of nitrided SiO2-Si interfaces. Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 17(4), 1258-1262.
URI: http://www.lib.ncsu.edu/resolver/1840.2/268


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