Suppression of subcutaneous oxidation during the deposition of amorphous lanthanum aluminate on silicon

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Title: Suppression of subcutaneous oxidation during the deposition of amorphous lanthanum aluminate on silicon
Date: 2004
Citation: Edge, L. F., Schlom, D. G., Brewer, R. T., Chabal, Y. J., Williams, J. R., Chambers, S. A., Hinkle, C., Lucovsky, G., Yang, Y., Stemmer, S., Copel, M., Hollander, B., & Schubert, J. (2004). Suppression of subcutaneous oxidation during the deposition of amorphous lanthanum aluminate on silicon. Applied physics letters, 84(23), 4629-4631.
URI: http://www.lib.ncsu.edu/resolver/1840.2/269


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