Thermal stability of plasma-nitrided aluminum oxide films on Si

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Title: Thermal stability of plasma-nitrided aluminum oxide films on Si
Date: 2004
Citation: Bastos, K. P., Pezzi, R. P., Miotti, L., Soares, G. V., Driemeier, C., Morais, J., Baumvol, I. J. R., Hinkle, C., & Lucovsky, G. (2004). Thermal stability of plasma-nitrided aluminum oxide films on Si. Applied physics letters, 84(1), 97-99.
URI: http://www.lib.ncsu.edu/resolver/1840.2/271


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