Interface studies of tungsten nitride and titanium nitride composite metal gate electrodes with thin dielectric layers

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Title: Interface studies of tungsten nitride and titanium nitride composite metal gate electrodes with thin dielectric layers
Date: 1988
Citation: Claflin, B., Binger, M., & Lucovsky, G. (1998). Interface studies of tungsten nitride and titanium nitride composite metal gate electrodes with thin dielectric layers. Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 16(3 pt.2), 1757-1761.
URI: http://www.lib.ncsu.edu/resolver/1840.2/280


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