Interface studies of tungsten nitride and titanium nitride composite metal gate electrodes with thin dielectric layers
No Thumbnail Available
Date
1988
Authors
Advisors
Journal Title
Series/Report No.
Journal ISSN
Volume Title
Publisher
Abstract
Description
Keywords
Citation
Claflin, B., Binger, M., & Lucovsky, G. (1998). Interface studies of tungsten nitride and titanium nitride composite metal gate electrodes with thin dielectric layers. Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 16(3 pt.2), 1757-1761.