Electronic properties of the Zr-ZrO2-SiO2-Si(100) gate stack structure

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Title: Electronic properties of the Zr-ZrO2-SiO2-Si(100) gate stack structure
Date: 2006
Citation: Fulton, C. C., Lucovsky, G., & Nemanich, R. J. (2006). Electronic properties of the Zr-ZrO2-SiO2-Si(100) gate stack structure. Journal of applied physics, 99(6).
URI: http://www.lib.ncsu.edu/resolver/1840.2/404


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