Dielectric functions and optical bandgaps of high-K dielectrics for metal-oxide-semiconductor field-effect transistors by far ultraviolet spectroscopic ellipsometry

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Title: Dielectric functions and optical bandgaps of high-K dielectrics for metal-oxide-semiconductor field-effect transistors by far ultraviolet spectroscopic ellipsometry
Date: 2002
Citation: Lim, S. G., Kriventsov, S., Jackson, T. N., Haeni, J. H., Schlom, D. G., Balbashov, A. M., Uecker, R., Reiche, P., Freeouf, J. L., & Lucovsky, G. (2002). Dielectric functions and optical bandgaps of high-K dielectrics for metal-oxide-semiconductor field-effect transistors by far ultraviolet spectroscopic ellipsometry. Journal of applied physics, 91(7), 4500-4505.
URI: http://www.lib.ncsu.edu/resolver/1840.2/411


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