Long-term reliability degradation of ultrathin dielectric films due to heavy-ion irradiation
| Title: | Long-term reliability degradation of ultrathin dielectric films due to heavy-ion irradiation |
| Date: | 2002 |
| Citation: | Choi, B. K., Fleetwood, D. M., Schrimpf, R. D., Massengill, L. W., Galloway, K. F., Shaneyfelt, M. R., Meisenheimer, T. L., Dodd, P. E., Schwank, J. R., Lee, Y. M., John, R. S., & Lucovsky, G. (2002). Long-term reliability degradation of ultrathin dielectric films due to heavy-ion irradiation. IEEE transactions on nuclear science, 49(6), 3045-3050. |
| URI: | http://www.lib.ncsu.edu/resolver/1840.2/412 |
Files in this item
| Files | Size | Format | View |
|---|---|---|---|
| lucovsky_2002_ieee_trans_nucl_sci_3045.pdf | 622.5Kb |
View/ |
