Long-term reliability degradation of ultrathin dielectric films due to heavy-ion irradiation
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2002
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Choi, B. K., Fleetwood, D. M., Schrimpf, R. D., Massengill, L. W., Galloway, K. F., Shaneyfelt, M. R., Meisenheimer, T. L., Dodd, P. E., Schwank, J. R., Lee, Y. M., John, R. S., & Lucovsky, G. (2002). Long-term reliability degradation of ultrathin dielectric films due to heavy-ion irradiation. IEEE transactions on nuclear science, 49(6), 3045-3050.
