Long-term reliability degradation of ultrathin dielectric films due to heavy-ion irradiation
| dc.date.accessioned | 2008-03-03T20:44:07Z | |
| dc.date.available | 2008-03-03T20:44:07Z | |
| dc.date.issued | 2002 | |
| dc.identifier.citation | Choi, B. K., Fleetwood, D. M., Schrimpf, R. D., Massengill, L. W., Galloway, K. F., Shaneyfelt, M. R., Meisenheimer, T. L., Dodd, P. E., Schwank, J. R., Lee, Y. M., John, R. S., & Lucovsky, G. (2002). Long-term reliability degradation of ultrathin dielectric films due to heavy-ion irradiation. IEEE transactions on nuclear science, 49(6), 3045-3050. | |
| dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/412 | |
| dc.format.extent | 637470 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | en | |
| dc.title | Long-term reliability degradation of ultrathin dielectric films due to heavy-ion irradiation | |
| dc.type | Article |
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| Files | Size | Format | View |
|---|---|---|---|
| lucovsky_2002_ieee_trans_nucl_sci_3045.pdf | 622.5Kb |
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