Thin-film deposition and microelectronic and optoelectronic device fabrication and characterization in monocrystalline alpha and beta silicon-carbide

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Title: Thin-film deposition and microelectronic and optoelectronic device fabrication and characterization in monocrystalline alpha and beta silicon-carbide
Date: 1991
Citation: Davis, R. F., Kelner, G., Shur, M., Palmour, J. W., & Edmond, J. A. (1991). Thin-film deposition and microelectronic and optoelectronic device fabrication and characterization in monocrystalline alpha and beta silicon-carbide. Proceedings of the IEEE, 79(5), 677-701.
URI: http://www.lib.ncsu.edu/resolver/1840.2/611


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