In situ cleaning of GaN(0001) surfaces in a metalorganic vapor phase epitaxy environment
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2004
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Reitmeier, Z. J., Park, J. S., Mecouch, W. J., & Davis, R. F. (2004). In situ cleaning of GaN(0001) surfaces in a metalorganic vapor phase epitaxy environment. Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 22(5), 2077-2082.
