Characterization of hydrogen etched 6h-sic(0001) substrates and subsequently grown AlN films.

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Title: Characterization of hydrogen etched 6h-sic(0001) substrates and subsequently grown AlN films.
Date: 2003
Citation: Hartman, J. D., Roskowski, A. M., Reitmeier, Z. J., Tracy, K. M., Davis, R. F., & Nemanich, R. J. (2003). Characterization of hydrogen etched 6h-sic(0001) substrates and subsequently grown AlN films. Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 21(2), 394-400.
URI: http://www.lib.ncsu.edu/resolver/1840.2/715


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