Characterization of hydrogen etched 6h-sic(0001) substrates and subsequently grown AlN films.
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2003
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Hartman, J. D., Roskowski, A. M., Reitmeier, Z. J., Tracy, K. M., Davis, R. F., & Nemanich, R. J. (2003). Characterization of hydrogen etched 6h-sic(0001) substrates and subsequently grown AlN films. Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 21(2), 394-400.
