Supersonic jet epitaxy of gallium nitride using triethylgallium and ammonia

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Title: Supersonic jet epitaxy of gallium nitride using triethylgallium and ammonia
Date: 2003
Citation: McGinnis, A. J., Thomson, D., Banks, A., Preble, E., Davis, R. F., & Lamb, H. H. (2003). Supersonic jet epitaxy of gallium nitride using triethylgallium and ammonia. Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 21(1), 294-301.
URI: http://www.lib.ncsu.edu/resolver/1840.2/718


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