Methods of spin cleaning substrates using carbon dioxide liquid

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Title: Methods of spin cleaning substrates using carbon dioxide liquid
Date: 2001
Citation: DeSimone, J. M., & Carbonell, R. G. (2001). Methods of spin cleaning substrates using carbon dioxide liquid. U.S. Patent No. 6,240,936. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/748


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