Semiconductor switching devices having buried gate electrodes and methods of forming same

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Title: Semiconductor switching devices having buried gate electrodes and methods of forming same
Date: 1999
Citation: Baliga, B. J. (1999). Semiconductor switching devices having buried gate electrodes and methods of forming same. U.S. Patent No. 5,912,497. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/827


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