Method for water vapor enhanced charged-particle-beam machining

Show full item record

Title: Method for water vapor enhanced charged-particle-beam machining
Date: 1999
Citation: Russell, P. E., Griffis, D. P., Shedd, G. M., Stark, T. J., & Vitarelli, J. (1999). Method for water vapor enhanced charged-particle-beam machining. U.S. Patent No. 5,958,799. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/831


Files in this item

Files Size Format View
US_5958799_A_I.pdf 75.45Kb PDF View/Open

This item appears in the following Collection(s)

Show full item record