Spin coating method and apparatus for liquid carbon dioxide systems

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Title: Spin coating method and apparatus for liquid carbon dioxide systems
Date: 1999
Citation: DeSimone, J. M., & Carbonell, R. G. (1999). Spin coating method and apparatus for liquid carbon dioxide systems. U.S. Patent No. 6,001,418. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/833


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