Methods of forming power semiconductor devices having T-shaped gate electrodes

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Title: Methods of forming power semiconductor devices having T-shaped gate electrodes
Date: 2001
Citation: Baliga, B. J. (2001). Methods of forming power semiconductor devices having T-shaped gate electrodes. U.S. Patent No. 6,303,410. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/846


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