Method for water vapor enhanced charged-particle-beam machining

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Title:	Method for water vapor enhanced charged-particle-beam machining
Date:	2000
Citation:	Russell, P. E., Griffis, D. P., Shedd, G. M., Stark, T. J., & Vitarelli, J. (2000). Method for water vapor enhanced charged-particle-beam machining. U.S. Patent No. 6,140,655. Washington, DC: U.S. Patent and Trademark Office.
URI:	http://www.lib.ncsu.edu/resolver/1840.2/864



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