Method for water vapor enhanced charged-particle-beam machining
| dc.date.accessioned | 2008-07-21T21:27:01Z | |
| dc.date.available | 2008-07-21T21:27:01Z | |
| dc.date.issued | 2000 | |
| dc.identifier.citation | Russell, P. E., Griffis, D. P., Shedd, G. M., Stark, T. J., & Vitarelli, J. (2000). Method for water vapor enhanced charged-particle-beam machining. U.S. Patent No. 6,140,655. Washington, DC: U.S. Patent and Trademark Office. | |
| dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/864 | |
| dc.format.extent | 77944 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | en | |
| dc.title | Method for water vapor enhanced charged-particle-beam machining | |
| dc.type | Patent |
Files in this item
| Files | Size | Format | View |
|---|---|---|---|
| US_6140655_A_I.pdf | 76.11Kb |
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