Methods of forming a plurality of semiconductor layers using spaced trench arrays

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Title: Methods of forming a plurality of semiconductor layers using spaced trench arrays
Date: 2001
Citation: Gehrke, T., Linthicum, K. J., & Davis, R. F. (2001). Methods of forming a plurality of semiconductor layers using spaced trench arrays. U.S. Patent No. 6,261,929. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/874


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