Methods of forming a plurality of semiconductor layers using spaced trench arrays

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dc.date.accessioned 2008-07-21T21:37:10Z
dc.date.available 2008-07-21T21:37:10Z
dc.date.issued 2001
dc.identifier.citation Gehrke, T., Linthicum, K. J., & Davis, R. F. (2001). Methods of forming a plurality of semiconductor layers using spaced trench arrays. U.S. Patent No. 6,261,929. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.uri http://www.lib.ncsu.edu/resolver/1840.2/874
dc.format.extent 74046 bytes
dc.format.mimetype application/pdf
dc.language.iso en
dc.title Methods of forming a plurality of semiconductor layers using spaced trench arrays
dc.type Patent


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