Methods of forming compound semiconductor layers using spaced trench arrays and semiconductor substrates formed thereby

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Title: Methods of forming compound semiconductor layers using spaced trench arrays and semiconductor substrates formed thereby
Date: 2002
Citation: Gehrke, T., Linthicum, K. J., & Davis, R. F. (2002). Methods of forming compound semiconductor layers using spaced trench arrays and semiconductor substrates formed thereby. U.S. Patent No. 6,486,042. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/911


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