Methods of forming compound semiconductor layers using spaced trench arrays and semiconductor substrates formed thereby
| Title: | Methods of forming compound semiconductor layers using spaced trench arrays and semiconductor substrates formed thereby |
| Date: | 2002 |
| Citation: | Gehrke, T., Linthicum, K. J., & Davis, R. F. (2002). Methods of forming compound semiconductor layers using spaced trench arrays and semiconductor substrates formed thereby. U.S. Patent No. 6,486,042. Washington, DC: U.S. Patent and Trademark Office. |
| URI: | http://www.lib.ncsu.edu/resolver/1840.2/911 |
Files in this item
| Files | Size | Format | View |
|---|---|---|---|
| US_6486042_B2_I.pdf | 80.50Kb |
View/ |
