Methods of forming compound semiconductor layers using spaced trench arrays and semiconductor substrates formed thereby
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2002
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Gehrke, T., Linthicum, K. J., & Davis, R. F. (2002). Methods of forming compound semiconductor layers using spaced trench arrays and semiconductor substrates formed thereby. U.S. Patent No. 6,486,042. Washington, DC: U.S. Patent and Trademark Office.
