Methods of forming compound semiconductor layers using spaced trench arrays and semiconductor substrates formed thereby

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dc.date.accessioned 2008-07-23T13:49:01Z
dc.date.available 2008-07-23T13:49:01Z
dc.date.issued 2002
dc.identifier.citation Gehrke, T., Linthicum, K. J., & Davis, R. F. (2002). Methods of forming compound semiconductor layers using spaced trench arrays and semiconductor substrates formed thereby. U.S. Patent No. 6,486,042. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.uri http://www.lib.ncsu.edu/resolver/1840.2/911
dc.format.extent 82441 bytes
dc.format.mimetype application/pdf
dc.language.iso en
dc.title Methods of forming compound semiconductor layers using spaced trench arrays and semiconductor substrates formed thereby
dc.type Patent


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