Methods of fabricating single electron transistors in which the thickness of an insulating layer defines spacing between electrodes
Title: | Methods of fabricating single electron transistors in which the thickness of an insulating layer defines spacing between electrodes |
Date: | 2004 |
Citation: | Brousseau, L. C., III. (2004). Methods of fabricating single electron transistors in which the thickness of an insulating layer defines spacing between electrodes. U.S. Patent No. 6,784,082. Washington, DC: U.S. Patent and Trademark Office. |
URI: | http://www.lib.ncsu.edu/resolver/1840.2/921 |
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