Chemically enhanced focused ion beam micro-machining of copper

Show full item record

Title: Chemically enhanced focused ion beam micro-machining of copper
Date: 2003
Citation: Russell, P. E., Griffis, D. P., & Gonzales Perez, J. C. (2003). Chemically enhanced focused ion beam micro-machining of copper. U.S. Patent No. 6,514,866. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/934


Files in this item

Files Size Format View
US_6514866_B2_I.pdf 75.85Kb PDF View/Open

This item appears in the following Collection(s)

Show full item record