Binary non-crystalline oxide analogs of silicon dioxide for use in gate dielectrics

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Title: Binary non-crystalline oxide analogs of silicon dioxide for use in gate dielectrics
Date: 2003
Citation: Lucovsky, G. (2003). Binary non-crystalline oxide analogs of silicon dioxide for use in gate dielectrics. U.S. Patent No. 6,552,403. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/941


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