Binary non-crystalline oxide analogs of silicon dioxide for use in gate dielectrics
| Title: | Binary non-crystalline oxide analogs of silicon dioxide for use in gate dielectrics |
| Date: | 2003 |
| Citation: | Lucovsky, G. (2003). Binary non-crystalline oxide analogs of silicon dioxide for use in gate dielectrics. U.S. Patent No. 6,552,403. Washington, DC: U.S. Patent and Trademark Office. |
| URI: | http://www.lib.ncsu.edu/resolver/1840.2/941 |
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