Chemically enhanced focused ion beam micro-machining of copper

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Title:	Chemically enhanced focused ion beam micro-machining of copper
Date:	2003
Citation:	Russell, P. E., Griffis, D. P., & Gonzales Perez, J. C. (2003). Chemically enhanced focused ion beam micro-machining of copper. U.S. Patent No. 6,645,872. Washington, DC: U.S. Patent and Trademark Office.
URI:	http://www.lib.ncsu.edu/resolver/1840.2/966



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