Chemically enhanced focused ion beam micro-machining of copper
Title: | Chemically enhanced focused ion beam micro-machining of copper |
Date: | 2003 |
Citation: | Russell, P. E., Griffis, D. P., & Gonzales Perez, J. C. (2003). Chemically enhanced focused ion beam micro-machining of copper. U.S. Patent No. 6,645,872. Washington, DC: U.S. Patent and Trademark Office. |
URI: | http://www.lib.ncsu.edu/resolver/1840.2/966 |
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