Chemically enhanced focused ion beam micro-machining of copper
| dc.date.accessioned | 2008-07-23T21:06:20Z | |
| dc.date.available | 2008-07-23T21:06:20Z | |
| dc.date.issued | 2003 | |
| dc.identifier.citation | Russell, P. E., Griffis, D. P., & Gonzales Perez, J. C. (2003). Chemically enhanced focused ion beam micro-machining of copper. U.S. Patent No. 6,645,872. Washington, DC: U.S. Patent and Trademark Office. | |
| dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/966 | |
| dc.format.extent | 79219 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | en | |
| dc.title | Chemically enhanced focused ion beam micro-machining of copper | |
| dc.type | Patent |
Files in this item
| Files | Size | Format | View |
|---|---|---|---|
| US_6645872_B2_I.pdf | 77.36Kb |
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