Methods of fabricating gallium nitride microelectronic layers on silicon layers

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Title: Methods of fabricating gallium nitride microelectronic layers on silicon layers
Date: 2003
Citation: Linthicum, K. J., Gehrke, T., Davis, R. F., Thomson, D. B., & Tracy, K. M. (2003). Methods of fabricating gallium nitride microelectronic layers on silicon layers. U.S. Patent No. 6,602,764. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/973


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