Lanthanum oxide-based dielectrics for integrated circuit capacitors

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Title: Lanthanum oxide-based dielectrics for integrated circuit capacitors
Date: 2004
Citation: Maria, J.-P., & Kingon, A. I. (2004). Lanthanum oxide-based dielectrics for integrated circuit capacitors. U.S. Patent No. 6,753,567. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/977


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