3D Nanofabrication Using AFM-Based Ultrasonic Vibration Assisted Nanomachining.

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Title: 3D Nanofabrication Using AFM-Based Ultrasonic Vibration Assisted Nanomachining.
Author: Deng, Jia
Advisors: Jingyan Dong, Co-Chair
Paul Cohen, Co-Chair
Chih-Hao Chang, Minor
Yuan-Shin Lee, Member
Consuelo Arellano, Graduate School Representative
Date: 2017-07-18
Degree: Doctor of Philosophy
Discipline: Industrial Engineering
URI: http://www.lib.ncsu.edu/resolver/1840.20/34702


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