From Novel Processes to Industry-Relevant Applications: Atomic Layer Deposition of Metal, Metal Oxide, and Metal Carbide Thin-Films.

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dc.contributor.advisor Gregory Parsons, Chair
dc.contributor.advisor Saad Khan, Member
dc.contributor.advisor Fanxing Li, Member
dc.contributor.advisor Michael Dickey, Member
dc.contributor.advisor Kara Peters, Graduate School Representative
dc.contributor.author Stevens, Eric Christopher
dc.date.accessioned 2018-07-12T12:31:34Z
dc.date.available 2018-07-12T12:31:34Z
dc.date.issued 2018-04-12
dc.date.submitted 2018-05-14
dc.identifier.other deg9566
dc.identifier.uri http://www.lib.ncsu.edu/resolver/1840.20/35382
dc.rights
dc.title From Novel Processes to Industry-Relevant Applications: Atomic Layer Deposition of Metal, Metal Oxide, and Metal Carbide Thin-Films.
dc.degree.name Doctor of Philosophy
dc.degree.level dissertation
dc.degree.discipline Chemical Engineering
dc.date.accepted 2018-07-11
dc.date.defense 2018-04-12
dc.date.released 2018-07-12
dc.date.reviewed 2018-05-15


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