Investigations of Atomic Layer Deposition and Thermal Atomic Layer Etching: Nucleation Trends, Area-Selectivity, and Phase Change Memory Materials.

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Title: Investigations of Atomic Layer Deposition and Thermal Atomic Layer Etching: Nucleation Trends, Area-Selectivity, and Phase Change Memory Materials.
Author: Saare, Holger
Advisors: Gregory Parsons, Chair
David Aspnes, Member
Divine Kumah, Member
Michael Dickey, Member
Date: 2021-08-23
Degree: Doctor of Philosophy
Discipline: Physics
URI: https://www.lib.ncsu.edu/resolver/1840.20/39075


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