Modeling and Simulation of Material Handling for Semiconductor Wafer Fabrication

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Title: Modeling and Simulation of Material Handling for Semiconductor Wafer Fabrication
Author: Pierce, N.G.; Stafford, R.
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 1994
Series/Report No.: Winter Simulation Conference Proceedings
URI: http://www.lib.ncsu.edu/resolver/1840.4/4555


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