Using Computer Simulation to Compare Tool Delivery Systems in an FMC

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Title: Using Computer Simulation to Compare Tool Delivery Systems in an FMC
Author: Hedlund, Eric P.; Davis, Wayne J.; Webster, Peter L.
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 1990
Series/Report No.: Winter Simulation Conference Proceedings
URI: http://www.lib.ncsu.edu/resolver/1840.4/4633


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