Diectrostatic operation and curvature modeling for a MEMs flexible film actuator

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Title: Diectrostatic operation and curvature modeling for a MEMs flexible film actuator
Author: Edmonds, B. Jr.; Ernstberger, Jon; Ghosh, K.; Malaugh, J.; Nfodjo, D.; Xu, X.; Dausch, D.; Goodwin, S.; Smith, Ralph C.
Publisher: North Carolina State University. Center for Research in Scientific Computation
Date: 2004
Series/Report No.: CRSC-TR04-08
Center for Research in Scientific Computation Technical Report
URI: http://www.ncsu.edu/crsc/reports/ftp/pdf/crsc-tr04-08.pdf
http://www.lib.ncsu.edu/resolver/1840.4/473


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