TRW/TED Accelerometer Wafer Process Production Facility: Manufacturing Simulation

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Title: TRW/TED Accelerometer Wafer Process Production Facility: Manufacturing Simulation
Author: Farey, Lawrence S.
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 1996
Series/Report No.: Winter Simulation Conference Proceedings
URI: http://www.lib.ncsu.edu/resolver/1840.4/5395


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