Model development and inverse compensator design for high speed nanopositioning

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Title: Model development and inverse compensator design for high speed nanopositioning
Author: Smith, Ralph C.; Salapaka, Murti V.; Hatch, Andrew G.; Smith, J.; De, Tathagata
Publisher: North Carolina State University. Center for Research in Scientific Computation
Date: 2002
Series/Report No.: CRSC-TR02-25
Center for Research in Scientific Computation Technical Report
URI: http://www.ncsu.edu/crsc/reports/ftp/pdf/crsc-tr02-25.pdf
http://www.lib.ncsu.edu/resolver/1840.4/547


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