Validation and Verification of the Simulation Model of a Photolithography Process in Semiconductor Manufacturing

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Title: Validation and Verification of the Simulation Model of a Photolithography Process in Semiconductor Manufacturing
Author: Nayani, Nirupama; Mollaghasemi, Mansooreh
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 1998
Series/Report No.: Winter Simulation Conference Proceedings
URI: http://www.lib.ncsu.edu/resolver/1840.4/5701


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