Operational Modeling and Simulation in Semiconductor Manufacturing

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Title: Operational Modeling and Simulation in Semiconductor Manufacturing
Author: Fowler, John W.; Fu, Michael C.; Schruben, Lee W.; Brown, Steven; Chance, Frank; Cunningham, Sean; Hilton, Courtland; Janakiram, Mani; Stafford, Rick; Hutchby, James
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 1998
Series/Report No.: Winter Simulation Conference Proceedings
URI: http://www.lib.ncsu.edu/resolver/1840.4/5905


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