Real-time process monitoring by P-polarized reflectance spectroscopy and closed-loop control of vapor phase epitaxy

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Title: Real-time process monitoring by P-polarized reflectance spectroscopy and closed-loop control of vapor phase epitaxy
Author: Banks, Harvey Thomas; Dietz, Nikolaus A.; Ito, Kazufumi
Publisher: North Carolina State University. Center for Research in Scientific Computation
Date: 2000
Series/Report No.: CRSC-TR00-15
Center for Research in Scientific Computation Technical Report
URI: http://www.ncsu.edu/crsc/reports/ftp/pdf/crsc-tr00-15.pdf
http://www.lib.ncsu.edu/resolver/1840.4/606


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