Autocorrelation of Cycle Times in Semiconductor Manufacturing Systems

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Title: Autocorrelation of Cycle Times in Semiconductor Manufacturing Systems
Author: Schmig, Alexander K.; Mittler, Manfred
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 1995
Series/Report No.: Winter Simulation Conference Proceedings
URI: http://www.lib.ncsu.edu/resolver/1840.4/6178


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