Reduced order modeling and control of thin film growth in an HPCVD reactor

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Title: Reduced order modeling and control of thin film growth in an HPCVD reactor
Author: Beeler, Scott C.; Kepler, Grace M.; Tran, Hien T.; Banks, Harvey Thomas
Publisher: North Carolina State University. Center for Research in Scientific Computation
Date: 2000
Series/Report No.: CRSC-TR00-33
Center for Research in Scientific Computation Technical Report
URI: http://www.ncsu.edu/crsc/reports/ftp/pdf/crsc-tr00-33.pdf
http://www.lib.ncsu.edu/resolver/1840.4/624


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