Reduced order model compensator control of species transport in a CVD reactor
Title: | Reduced order model compensator control of species transport in a CVD reactor |
Author: | Kepler, Grace M.; Tran, Hien T.; Banks, Harvey Thomas |
Publisher: | North Carolina State University. Center for Research in Scientific Computation |
Date: | 1999 |
Series/Report No.: | CRSC-TR99-15 Center for Research in Scientific Computation Technical Report |
URI: |
http://www.ncsu.edu/crsc/reports/ftp/pdf/crsc-tr99-15.pdf
http://www.lib.ncsu.edu/resolver/1840.4/640 |
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