Reduced order model compensator control of species transport in a CVD reactor

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dc.contributor.author Kepler, Grace M.
dc.contributor.author Tran, Hien T.
dc.contributor.author Banks, Harvey Thomas
dc.date.accessioned 2006-11-14T12:45:34Z
dc.date.available 2006-11-14T12:45:34Z
dc.date.issued 1999
dc.identifier.uri http://www.ncsu.edu/crsc/reports/ftp/pdf/crsc-tr99-15.pdf
dc.identifier.uri http://www.lib.ncsu.edu/resolver/1840.4/640
dc.format.extent 837674 bytes
dc.format.mimetype application/pdf
dc.format.mimetype application/pdf
dc.language.iso en
dc.publisher North Carolina State University. Center for Research in Scientific Computation
dc.relation.ispartofseries CRSC-TR99-15
dc.relation.ispartofseries Center for Research in Scientific Computation Technical Report
dc.title Reduced order model compensator control of species transport in a CVD reactor
dc.type Technical report


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