compensator control for chemical vapor deposition film growth using reduced order design models

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Title: compensator control for chemical vapor deposition film growth using reduced order design models
Author: Kepler, Grace M.; Tran, Hien T.; Banks, Harvey Thomas
Publisher: North Carolina State University. Center for Research in Scientific Computation
Date: 1999
Series/Report No.: CRSC-TR99-41
Center for Research in Scientific Computation Technical Report
URI: http://www.ncsu.edu/crsc/reports/ftp/pdf/crsc-tr99-41.pdf
http://www.lib.ncsu.edu/resolver/1840.4/663


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